Chemical Vapour Deposition Growth Processes on an Atomic Level

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Karin Larsson, "Chemical Vapour Deposition: Growth Processes on an Atomic Level"
English | 2023 | ISBN: 0750331054 | PDF | pages: 416 | 72.5 mb
This is the first book to cover CVD growth processes at the atomic level using a combination of theoretical and experimental tools, including density functional theory (DFT) calculations. By demonstrating the methodology behind the modelling and simulation of CVD growth processes, the text provides guidance and practical advice on how to acquire successful theoretical results.


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